Products

R&D Film Deposition Equipment

Production Film Deposition Equipment

Vacuum Transfer Module

Ultra-high Vacuum Components

Customization Services

Magnetically-coupled transfer arm

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Magnetically-coupled transfer arm

Gear transfer arm

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Gear transfer arm

Port aligner

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Port aligner

Viewport shutter

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Viewport shutter

Vacuum fast door

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Vacuum fast door

Butterfly valve

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Butterfly valve

Software System Customization

1. Real time performance: The fully automatic upper computer software can obtain and display real-time status information during the operation of the device. Users can understand the current situation of the device at any time and take corresponding measures in a timely manner. 2. Visualization: The fully automatic upper computer software presents the complex scheduling and process of the robotic arm through a graphical interface, and adds real-time curve graphs, allowing users to intuitively understand the dynamic status of the equipment. The visual interface can be used to monitor the operation status of the equipment, the progress of the process, and so on. 3. Scalability: The fully automatic upper computer software can be customized according to different customer needs, and can expand different lower level electrical controls to meet various process requirements and achieve various coating processes.

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Software System Customization

Pulsed Laser Deposition System—PLD-300

PLD-300 equipment comes standard with 6 1-inch target materials, which can achieve deposition of oxides and multi-component thin films. The target material of the equipment can be replaced in situ, and high-quality thin film deposition can be achieved with RHEED and excimer lasers.

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Pulsed Laser Deposition System—PLD-300
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