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Vacuum fast door

Butterfly valve

Software System Customization

1. Real time performance: The fully automatic upper computer software can obtain and display real-time status information during the operation of the device. Users can understand the current situation of the device at any time and take corresponding measures in a timely manner. 2. Visualization: The fully automatic upper computer software presents the complex scheduling and process of the robotic arm through a graphical interface, and adds real-time curve graphs, allowing users to intuitively understand the dynamic status of the equipment. The visual interface can be used to monitor the operation status of the equipment, the progress of the process, and so on. 3. Scalability: The fully automatic upper computer software can be customized according to different customer needs, and can expand different lower level electrical controls to meet various process requirements and achieve various coating processes.

Pulsed Laser Deposition System—PLD-300

PLD-300 equipment comes standard with 6 1-inch target materials, which can achieve deposition of oxides and multi-component thin films. The target material of the equipment can be replaced in situ, and high-quality thin film deposition can be achieved with RHEED and excimer lasers.

Thermal resistance evaporation equipment TE-100

The TE-100 equipment can achieve evaporation and deposition of metals, dielectric materials, and organic materials. The sample stage can be water-cooled or heated, rotating or adjustable tilt angle. The material is placed in an evaporation boat and heated to the evaporation point, and then the evaporated atoms deposit on the surface of the wafer to form a thin film. Suitable for materials research and production fields.

Desktop etching equipment Etch-200

The Etch-200 equipment is equipped with an ion source, and the diameter of the ion source can be selected according to the needs, which can achieve cleaning and etching of samples of 4 inches and below.

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